Cargando…
Performance Analysis of Resonantly Driven Piezoelectric Sensors Operating in Amplitude Mode and Phase Mode
Piezoelectric layers coupled to micromechanical resonators serve as the basis for sensors to detect a variety of different physical quantities. In contrast to passive sensors, actively operated sensors exploit a detuning of the resonance frequency caused by the signal to be measured. To detect the t...
| Autores principales: | , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9959097/ https://www.ncbi.nlm.nih.gov/pubmed/36850497 http://dx.doi.org/10.3390/s23041899 |