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Efficient Convolutional Neural Networks for Semiconductor Wafer Bin Map Classification
The results obtained in the wafer test process are expressed as a wafer map and contain important information indicating whether each chip on the wafer is functioning normally. The defect patterns shown on the wafer map provide information about the process and equipment in which the defect occurred...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9960339/ https://www.ncbi.nlm.nih.gov/pubmed/36850523 http://dx.doi.org/10.3390/s23041926 |