Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure

With the intelligent tool cutting force measurement model as the engineering background, the selection, design, and optimization of the substrate structure of the tool-embedded thin-film strain sensor are studied. The structure of the thin-film strain sensor is studied, and the substrate structure d...

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Detalles Bibliográficos
Autores principales: He, Zhenyu, Wu, Wenge, Cheng, Yunping, Liu, Lijuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961063/
https://www.ncbi.nlm.nih.gov/pubmed/36838055
http://dx.doi.org/10.3390/mi14020355

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961063/
https://www.ncbi.nlm.nih.gov/pubmed/36838055
http://dx.doi.org/10.3390/mi14020355

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