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Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure
With the intelligent tool cutting force measurement model as the engineering background, the selection, design, and optimization of the substrate structure of the tool-embedded thin-film strain sensor are studied. The structure of the thin-film strain sensor is studied, and the substrate structure d...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961063/ https://www.ncbi.nlm.nih.gov/pubmed/36838055 http://dx.doi.org/10.3390/mi14020355 |