Enhanced Wettability, Hardness, and Tunable Optical Properties of SiC(x)N(y) Coatings Formed by Reactive Magnetron Sputtering

Silicon carbonitride films were deposited on Si (100), Ge (111), and fused silica substrates through the reactive magnetron sputtering of a SiC target in an argon-nitrogen mixture. The deposition was carried out at room temperature and 300 °C and at an RF target power of 50–150 W. An increase in the...

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Detalles Bibliográficos
Autores principales: Sulyaeva, Veronica S., Kolodin, Alexey N., Khomyakov, Maxim N., Kozhevnikov, Alexander K., Kosinova, Marina L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961253/
https://www.ncbi.nlm.nih.gov/pubmed/36837106
http://dx.doi.org/10.3390/ma16041467

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961253/
https://www.ncbi.nlm.nih.gov/pubmed/36837106
http://dx.doi.org/10.3390/ma16041467

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