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Enhanced Wettability, Hardness, and Tunable Optical Properties of SiC(x)N(y) Coatings Formed by Reactive Magnetron Sputtering
Silicon carbonitride films were deposited on Si (100), Ge (111), and fused silica substrates through the reactive magnetron sputtering of a SiC target in an argon-nitrogen mixture. The deposition was carried out at room temperature and 300 °C and at an RF target power of 50–150 W. An increase in the...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961253/ https://www.ncbi.nlm.nih.gov/pubmed/36837106 http://dx.doi.org/10.3390/ma16041467 |