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The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
The paper presents the results concerning the influence of the thickness of the ITO and In(2)O(3) layers deposited by the magnetron sputtering method on the physical parameters characterising their surface properties. The characterisation parameters were obtained by atomic force microscopy (AFM), X-...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961801/ https://www.ncbi.nlm.nih.gov/pubmed/36836993 http://dx.doi.org/10.3390/ma16041363 |