The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters

The paper presents the results concerning the influence of the thickness of the ITO and In(2)O(3) layers deposited by the magnetron sputtering method on the physical parameters characterising their surface properties. The characterisation parameters were obtained by atomic force microscopy (AFM), X-...

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Detalles Bibliográficos
Autores principales: Musztyfaga-Staszuk, Małgorzata, Gawlińska-Nęcek, Katarzyna, Socha, Robert, Panek, Piotr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961801/
https://www.ncbi.nlm.nih.gov/pubmed/36836993
http://dx.doi.org/10.3390/ma16041363
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author Musztyfaga-Staszuk, Małgorzata
Gawlińska-Nęcek, Katarzyna
Socha, Robert
Panek, Piotr
author_facet Musztyfaga-Staszuk, Małgorzata
Gawlińska-Nęcek, Katarzyna
Socha, Robert
Panek, Piotr
author_sort Musztyfaga-Staszuk, Małgorzata
collection PubMed
description The paper presents the results concerning the influence of the thickness of the ITO and In(2)O(3) layers deposited by the magnetron sputtering method on the physical parameters characterising their surface properties. The characterisation parameters were obtained by atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and Kelvin probe. The increase in the layers’ thickness related to the time of their fabrication causes an increase in the surface roughness and the value of the work function, followed by a decrease in the concentration of elements and compounds in the near-surface area.
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spelling pubmed-99618012023-02-26 The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters Musztyfaga-Staszuk, Małgorzata Gawlińska-Nęcek, Katarzyna Socha, Robert Panek, Piotr Materials (Basel) Article The paper presents the results concerning the influence of the thickness of the ITO and In(2)O(3) layers deposited by the magnetron sputtering method on the physical parameters characterising their surface properties. The characterisation parameters were obtained by atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and Kelvin probe. The increase in the layers’ thickness related to the time of their fabrication causes an increase in the surface roughness and the value of the work function, followed by a decrease in the concentration of elements and compounds in the near-surface area. MDPI 2023-02-06 /pmc/articles/PMC9961801/ /pubmed/36836993 http://dx.doi.org/10.3390/ma16041363 Text en © 2023 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Musztyfaga-Staszuk, Małgorzata
Gawlińska-Nęcek, Katarzyna
Socha, Robert
Panek, Piotr
The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title_full The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title_fullStr The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title_full_unstemmed The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title_short The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters
title_sort influence of the ito layers’ thicknesses on their chosen physical surface parameters
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961801/
https://www.ncbi.nlm.nih.gov/pubmed/36836993
http://dx.doi.org/10.3390/ma16041363
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