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The Influence of the ITO Layers’ Thicknesses on Their Chosen Physical Surface Parameters

The paper presents the results concerning the influence of the thickness of the ITO and In(2)O(3) layers deposited by the magnetron sputtering method on the physical parameters characterising their surface properties. The characterisation parameters were obtained by atomic force microscopy (AFM), X-...

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Detalles Bibliográficos
Autores principales: Musztyfaga-Staszuk, Małgorzata, Gawlińska-Nęcek, Katarzyna, Socha, Robert, Panek, Piotr
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9961801/
https://www.ncbi.nlm.nih.gov/pubmed/36836993
http://dx.doi.org/10.3390/ma16041363