Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS

The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechani...

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Detalles Bibliográficos
Autores principales: Krayden, Adir, Shlenkevitch, Dima, Blank, Tanya, Stolyarova, Sara, Nemirovsky, Yael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9962487/
https://www.ncbi.nlm.nih.gov/pubmed/36838090
http://dx.doi.org/10.3390/mi14020390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9962487/
https://www.ncbi.nlm.nih.gov/pubmed/36838090
http://dx.doi.org/10.3390/mi14020390

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