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Selective Sensing of Mixtures of Gases with CMOS-SOI-MEMS Sensor Dubbed GMOS
The need to achieve digital gas sensing technology, namely, a technology to sense and transmit gas-enabled digital media, has been recognized as highly challenging. This challenge has motivated the authors to focus on complementary metal oxide semiconductor silicon on insulator micro electro-mechani...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9962487/ https://www.ncbi.nlm.nih.gov/pubmed/36838090 http://dx.doi.org/10.3390/mi14020390 |