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Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz
The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor po...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963421/ https://www.ncbi.nlm.nih.gov/pubmed/36837981 http://dx.doi.org/10.3390/mi14020280 |