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Design and Fabrication of a MEMS Bandpass Filter with Different Center Frequency of 8.5–12 GHz

The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor po...

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Detalles Bibliográficos
Autores principales: Zhang, Yi-Fei, Cui, Min, Wu, Dong-Ping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9963421/
https://www.ncbi.nlm.nih.gov/pubmed/36837981
http://dx.doi.org/10.3390/mi14020280

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