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Parameter Optimization of RB-SiC Polishing by Femtosecond Laser

Reaction-boned silicon carbide (RB-SiC) is considered a new material for large lightweight ground-based space telescopes due to its high specific stiffness, low thermal deformation, and excellent optical quality. The excellent mechanical properties of RB-SiC result in the low efficiency of tradition...

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Detalles Bibliográficos
Autores principales: Yang, Tingkai, Liu, Changhua, Chen, Tao, Shao, Meng, Jiang, Chun, Lu, Changzheng, Song, Shijun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9964954/
https://www.ncbi.nlm.nih.gov/pubmed/36837211
http://dx.doi.org/10.3390/ma16041582