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Epitaxial Lateral Overgrowth of GaN on a Laser-Patterned Graphene Mask
Epitaxial lateral overgrowth (ELO) of GaN epilayers on a sapphire substrate was studied by using a laser-patterned graphene interlayer. Monolayer graphene was transferred onto the sapphire substrate using a wet transfer technique, and its quality was confirmed by Raman spectroscopy. The graphene lay...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9966900/ https://www.ncbi.nlm.nih.gov/pubmed/36839152 http://dx.doi.org/10.3390/nano13040784 |