Investigation of V/III ratio dependencies for optimizing AlN growth during reduced parasitic reaction in metalorganic vapor phase epitaxy

AlGaN-based ultraviolet (UV) light-emitting diodes (LEDs) are expected to have various applications, including sensing and printing, and light with ultraviolet-C (UVC) wavelengths has a virus inactivation effect. The metalorganic vapor phase epitaxy (MOVPE) method has been used to fabricate LED devi...

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Detalles Bibliográficos
Autores principales: Tomita, Atsushi, Miyagawa, Takumi, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki, Nagamatsu, Kentaro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9969028/
https://www.ncbi.nlm.nih.gov/pubmed/36849503
http://dx.doi.org/10.1038/s41598-023-30489-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9969028/
https://www.ncbi.nlm.nih.gov/pubmed/36849503
http://dx.doi.org/10.1038/s41598-023-30489-z

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