Precision enhanced alignment bonding technique with sacrificial strategy

This work proposes an “N2-1” sacrificial strategy to help to improve the accuracy of the bonding technique from the existing level. The target micropattern is copied N2 times, and (N2-1) of them are sacrificed to obtain the most accurate alignment. Meanwhile, a method for manufacturing auxiliary sol...

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Detalles Bibliográficos
Autores principales: Li, Qian, Ye, Zi, Liu, Mingyang, Liu, Wei, Zhang, Pan, Sun, Xiao, Zhang, Huimin, Li, Zhenming, Gui, Lin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Frontiers Media S.A. 2023
Materias:
Bioengineering and Biotechnology
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9978516/
https://www.ncbi.nlm.nih.gov/pubmed/36873376
http://dx.doi.org/10.3389/fbioe.2023.1105154

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9978516/
https://www.ncbi.nlm.nih.gov/pubmed/36873376
http://dx.doi.org/10.3389/fbioe.2023.1105154

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