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Precision enhanced alignment bonding technique with sacrificial strategy
This work proposes an “N2-1” sacrificial strategy to help to improve the accuracy of the bonding technique from the existing level. The target micropattern is copied N2 times, and (N2-1) of them are sacrificed to obtain the most accurate alignment. Meanwhile, a method for manufacturing auxiliary sol...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Frontiers Media S.A.
2023
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9978516/ https://www.ncbi.nlm.nih.gov/pubmed/36873376 http://dx.doi.org/10.3389/fbioe.2023.1105154 |