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Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation
[Image: see text] Surface acoustic wave (SAW)-based acoustofluidic devices have shown broad applications in microfluidic actuation and particle/cell manipulation. Conventional SAW acoustofluidic device fabrication generally includes photolithography and lift-off processes and thus requires accessing...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9979341/ https://www.ncbi.nlm.nih.gov/pubmed/36873004 http://dx.doi.org/10.1021/acsomega.2c07589 |