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Gas Phase Reaction of Silane with Water at Different Temperatures and Supported by Plasma
[Image: see text] The interaction of silane and water is discussed controversially in literature: some authors suggest monosilane and water react kinetically and sufficiently fast enough to remove water, while others state the reaction occurs only at elevated temperatures. This question is of techno...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9996801/ https://www.ncbi.nlm.nih.gov/pubmed/36910983 http://dx.doi.org/10.1021/acsomega.2c07209 |