Sidewall patterning of organic–inorganic multilayer thin film encapsulation by adhesion lithography
A simple sidewall patterning process for organic–inorganic multilayer thin-film encapsulation (TFE) has been proposed and demonstrated. An Al(2)O(3) thin film grown by atomic layer deposition (ALD) was patterned by adhesion lithography using the difference in interfacial adhesion strength. The diffe...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10390510/ https://www.ncbi.nlm.nih.gov/pubmed/37524726 http://dx.doi.org/10.1038/s41598-023-39155-w |