Two-Dimensional Self-Consistent Radio Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference RF Reference Cell

Over the past few years multidimensional self-consistent plasma simulations including complex chemistry have been developed which are promising tools for furthering our understanding of reactive gas plasmas and for reactor design and optimization. These simulations must be benchmarked against experi...

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Detalles Bibliográficos
Autores principales: Lymberopoulos, Dimitris P., Economou, Demetre J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887236/
https://www.ncbi.nlm.nih.gov/pubmed/29151756
http://dx.doi.org/10.6028/jres.100.036

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887236/
https://www.ncbi.nlm.nih.gov/pubmed/29151756
http://dx.doi.org/10.6028/jres.100.036

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