Enhanced Corrosion Resistance of PVD-CrN Coatings by ALD Sealing Layers
Multilayered hard coatings with a CrN matrix and an Al(2)O(3), TiO(2), or nanolaminate-Al(2)O(3)/TiO(2) sealing layer were designed by a hybrid deposition process combined with physical vapor deposition (PVD) and atomic layer deposition (ALD). The strategy was to utilize ALD thin films as pinhole-fr...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5380549/ https://www.ncbi.nlm.nih.gov/pubmed/28381072 http://dx.doi.org/10.1186/s11671-017-2020-1 |