Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact m...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/ https://www.ncbi.nlm.nih.gov/pubmed/34945292 http://dx.doi.org/10.3390/mi12121440 |
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author | Samotaev, Nikolay Oblov, Konstantin Dzhumaev, Pavel Fritsch, Marco Mosch, Sindy Vinnichenko, Mykola Trofimenko, Nikolai Baumgärtner, Christoph Fuchs, Franz-Martin Wissmeier, Lena |
author_facet | Samotaev, Nikolay Oblov, Konstantin Dzhumaev, Pavel Fritsch, Marco Mosch, Sindy Vinnichenko, Mykola Trofimenko, Nikolai Baumgärtner, Christoph Fuchs, Franz-Martin Wissmeier, Lena |
author_sort | Samotaev, Nikolay |
collection | PubMed |
description | The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping. |
format | Online Article Text |
id | pubmed-8707025 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2021 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-87070252021-12-25 Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors Samotaev, Nikolay Oblov, Konstantin Dzhumaev, Pavel Fritsch, Marco Mosch, Sindy Vinnichenko, Mykola Trofimenko, Nikolai Baumgärtner, Christoph Fuchs, Franz-Martin Wissmeier, Lena Micromachines (Basel) Article The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping. MDPI 2021-11-25 /pmc/articles/PMC8707025/ /pubmed/34945292 http://dx.doi.org/10.3390/mi12121440 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Samotaev, Nikolay Oblov, Konstantin Dzhumaev, Pavel Fritsch, Marco Mosch, Sindy Vinnichenko, Mykola Trofimenko, Nikolai Baumgärtner, Christoph Fuchs, Franz-Martin Wissmeier, Lena Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title | Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title_full | Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title_fullStr | Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title_full_unstemmed | Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title_short | Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors |
title_sort | combination of ceramic laser micromachining and printed technology as a way for rapid prototyping semiconductor gas sensors |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/ https://www.ncbi.nlm.nih.gov/pubmed/34945292 http://dx.doi.org/10.3390/mi12121440 |
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