Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact m...

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Autores principales: Samotaev, Nikolay, Oblov, Konstantin, Dzhumaev, Pavel, Fritsch, Marco, Mosch, Sindy, Vinnichenko, Mykola, Trofimenko, Nikolai, Baumgärtner, Christoph, Fuchs, Franz-Martin, Wissmeier, Lena
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/
https://www.ncbi.nlm.nih.gov/pubmed/34945292
http://dx.doi.org/10.3390/mi12121440
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author Samotaev, Nikolay
Oblov, Konstantin
Dzhumaev, Pavel
Fritsch, Marco
Mosch, Sindy
Vinnichenko, Mykola
Trofimenko, Nikolai
Baumgärtner, Christoph
Fuchs, Franz-Martin
Wissmeier, Lena
author_facet Samotaev, Nikolay
Oblov, Konstantin
Dzhumaev, Pavel
Fritsch, Marco
Mosch, Sindy
Vinnichenko, Mykola
Trofimenko, Nikolai
Baumgärtner, Christoph
Fuchs, Franz-Martin
Wissmeier, Lena
author_sort Samotaev, Nikolay
collection PubMed
description The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.
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spelling pubmed-87070252021-12-25 Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors Samotaev, Nikolay Oblov, Konstantin Dzhumaev, Pavel Fritsch, Marco Mosch, Sindy Vinnichenko, Mykola Trofimenko, Nikolai Baumgärtner, Christoph Fuchs, Franz-Martin Wissmeier, Lena Micromachines (Basel) Article The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping. MDPI 2021-11-25 /pmc/articles/PMC8707025/ /pubmed/34945292 http://dx.doi.org/10.3390/mi12121440 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Samotaev, Nikolay
Oblov, Konstantin
Dzhumaev, Pavel
Fritsch, Marco
Mosch, Sindy
Vinnichenko, Mykola
Trofimenko, Nikolai
Baumgärtner, Christoph
Fuchs, Franz-Martin
Wissmeier, Lena
Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title_full Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title_fullStr Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title_full_unstemmed Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title_short Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors
title_sort combination of ceramic laser micromachining and printed technology as a way for rapid prototyping semiconductor gas sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/
https://www.ncbi.nlm.nih.gov/pubmed/34945292
http://dx.doi.org/10.3390/mi12121440
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