Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator

The reliability and stability of MEMS electrostatic comb resonators have become bottlenecks in practical applications. However, there are few studies that comprehensively consider the nonlinear dynamic behavior characteristics of MEMS systems and devices in a coupled field so that the related simula...

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Detalles Bibliográficos
Autores principales: Yu, Zhanqing, Chen, Shiping, Mou, Ya, Hu, Fade
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838054/
https://www.ncbi.nlm.nih.gov/pubmed/35161817
http://dx.doi.org/10.3390/s22031056

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838054/
https://www.ncbi.nlm.nih.gov/pubmed/35161817
http://dx.doi.org/10.3390/s22031056

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