Concepts and Key Technologies of Microelectromechanical Systems Resonators
In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stabi...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/ https://www.ncbi.nlm.nih.gov/pubmed/36557494 http://dx.doi.org/10.3390/mi13122195 |
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author | Feng, Tianren Yuan, Quan Yu, Duli Wu, Bo Wang, Hui |
author_facet | Feng, Tianren Yuan, Quan Yu, Duli Wu, Bo Wang, Hui |
author_sort | Feng, Tianren |
collection | PubMed |
description | In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications. |
format | Online Article Text |
id | pubmed-9783679 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-97836792022-12-24 Concepts and Key Technologies of Microelectromechanical Systems Resonators Feng, Tianren Yuan, Quan Yu, Duli Wu, Bo Wang, Hui Micromachines (Basel) Review In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications. MDPI 2022-12-11 /pmc/articles/PMC9783679/ /pubmed/36557494 http://dx.doi.org/10.3390/mi13122195 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Review Feng, Tianren Yuan, Quan Yu, Duli Wu, Bo Wang, Hui Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title | Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title_full | Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title_fullStr | Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title_full_unstemmed | Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title_short | Concepts and Key Technologies of Microelectromechanical Systems Resonators |
title_sort | concepts and key technologies of microelectromechanical systems resonators |
topic | Review |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/ https://www.ncbi.nlm.nih.gov/pubmed/36557494 http://dx.doi.org/10.3390/mi13122195 |
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