Concepts and Key Technologies of Microelectromechanical Systems Resonators

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stabi...

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Autores principales: Feng, Tianren, Yuan, Quan, Yu, Duli, Wu, Bo, Wang, Hui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/
https://www.ncbi.nlm.nih.gov/pubmed/36557494
http://dx.doi.org/10.3390/mi13122195
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author Feng, Tianren
Yuan, Quan
Yu, Duli
Wu, Bo
Wang, Hui
author_facet Feng, Tianren
Yuan, Quan
Yu, Duli
Wu, Bo
Wang, Hui
author_sort Feng, Tianren
collection PubMed
description In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.
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spelling pubmed-97836792022-12-24 Concepts and Key Technologies of Microelectromechanical Systems Resonators Feng, Tianren Yuan, Quan Yu, Duli Wu, Bo Wang, Hui Micromachines (Basel) Review In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications. MDPI 2022-12-11 /pmc/articles/PMC9783679/ /pubmed/36557494 http://dx.doi.org/10.3390/mi13122195 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Review
Feng, Tianren
Yuan, Quan
Yu, Duli
Wu, Bo
Wang, Hui
Concepts and Key Technologies of Microelectromechanical Systems Resonators
title Concepts and Key Technologies of Microelectromechanical Systems Resonators
title_full Concepts and Key Technologies of Microelectromechanical Systems Resonators
title_fullStr Concepts and Key Technologies of Microelectromechanical Systems Resonators
title_full_unstemmed Concepts and Key Technologies of Microelectromechanical Systems Resonators
title_short Concepts and Key Technologies of Microelectromechanical Systems Resonators
title_sort concepts and key technologies of microelectromechanical systems resonators
topic Review
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9783679/
https://www.ncbi.nlm.nih.gov/pubmed/36557494
http://dx.doi.org/10.3390/mi13122195
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