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Radial Error Motion Measurement and Its Uncertainty Estimation of Ultra Precision Axes of Rotation with Nanometer Level Precision

The radial error is the key performance indicator of ultra-precision axis. In order to measure and evaluate the radial error of ultra-precision axis with nanometer accuracy, a measurement system with an accuracy of nanometer based on capacitive displacement probes and standard spheres is developed....

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Detalles Bibliográficos
Autores principales:	Liu, Xingbao, Rui, Xiaoting, Mi, Liang, Tang, Qiang, Chen, Heng, Xia, Yangqiu
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9786809/ https://www.ncbi.nlm.nih.gov/pubmed/36557419 http://dx.doi.org/10.3390/mi13122121

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