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Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication
Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (ca...
Autores principales: | Kluba, Marta Maria, Li, Jian, Parkkinen, Katja, Louwerse, Marcus, Snijder, Jaap, Dekker, Ronald |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8070108/ https://www.ncbi.nlm.nih.gov/pubmed/33918068 http://dx.doi.org/10.3390/mi12040414 |
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