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Modeling of MEMS Transducers with Perforated Moving Electrodes
Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical mode...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10222298/ https://www.ncbi.nlm.nih.gov/pubmed/37241545 http://dx.doi.org/10.3390/mi14050921 |