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The High-Efficiency Design Method for Capacitive MEMS Accelerometer

In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconve...

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Detalles Bibliográficos
Autores principales:	Liu, Wen, Zhao, Tianlong, He, Zhiyuan, Ye, Jingze, Gong, Shaotong, Wang, Xianglong, Yang, Yintang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2023
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10609016/ https://www.ncbi.nlm.nih.gov/pubmed/37893328 http://dx.doi.org/10.3390/mi14101891

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